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ZeroMicron Carriers
We
are an authorized Rep for ZeroMicron, Contact us Today!
[Phone]
01.708.878.1994
[Email]
sales@inspecglobal.com
Zeromicron®
or ZM™, has perfected over many years of research and development, a
patented new generation of advanced-design
polishing
templates, carriers, and CMP Holders, and other wafer polishing
accessories. The Zeromicron® Team consists of a variety of
technology industry veterans, together with a strong core of
polishing experts with many years of direct hands-on experience in
wafer polishing production, engineering, R&D, and management. This
variety and depth of experience, combined with the exceptional
patented ZM™ products, provides substantial advantages, and a wide
range of strategic applications for it customers.
Zeromicron®
has developed a wide variety of wafer polishing templates, carriers,
CMP holders, pad conditioner tools, and various associated
accessories. A key element to the patterned Zerommicron® designs is
its s3 (Shim Spinning System). This major advancement in wafer
polishing technology allows for the wafer to spin or rotate inside
the template cavity or pocket during polishing. This dynamic feature
provides for even and consistent polishing across the entire surface
of the wafer.
We are an
authorized Rep for ZeroMicron, Contact us Today!
[Phone]
01.708.878.1994
[Email]
sales@inspecglobal.com
The wafer
rotation, or spinning effect, is achieved using two pieces, called
the "SHIM" and the "INSERT". the shim is placed at the bottom of the
template cavity, and the black napcon insert is placed on the top of
the shim. The wafer is then placed on top of the napcon insert, and
adheres to the insert through water suction (this is the clean wet
process). The insert/shim combination then spins within the
template/carrier cavity during polishing, while remaining firmly
seated in the cavity at start up, and through out the polishing run.
The Zeromicron® S3 system allow for rotation or spinning to occur at
3 different levels, the polishing table/platen, the polishing head,
and the wafer within the template cavity. The relief of pressure
against the cavity walls through the spinning process avoids wafer
blowouts, drops, and eliminates damage to the wafer, the cavity
wall, template, and the polishing pad.
We are an
authorized Rep for ZeroMicron, Contact us Today!
[Phone]
01.708.878.1994
[Email]
sales@inspecglobal.com
The shims are
provided in a variety of size and thickness, to accommodate all
wafer diameters, material thicknesses, and polishing removal
requirements. The different shim thicknesses allow for a broader
range of material thickness to be polished with the same template,
thus reducing the need for many templates with different cavity
depths. This is accomplished by simply using a different thickness
of shim to adjust cavity depth for a different thickness of
material. Please see the Illustration provided to further describe
the unique and effective features of the Zeromicron® S3 Shim
Spinning System.
We are an
authorized Rep for ZeroMicron, Contact us Today!
[Phone]
01.708.878.1994
[Email]
sales@inspecglobal.com
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